Nanofabrication

Nano- and micro-fabrication facilities

• MSU W. M. Keck Microfabrication Facility
• Berkeley MicroLab in transition to Marvell Nanofabrication Laboratory
• ETH Zurich FIRST Center for Micro- and Nanoscience (datasheets for commonly used chemicals)
• Stanford Nanofabrication Facility
• Cornell NanoScale Science & Technology Facility (CNF)
• Penn State NNIN(contains some manuals for the facilities used in MSU Keck cleanroom)
• Yale Cleanroom Recipes

Handbooks/Manuals

• Berkeley Microlab Manual
• Cornell CNF Shour Course: Technology & Characterization at the Nanoscale
• Cornel CNF Laboratory Usage and Safety Manual
• SPIE Handbook of Mcirolithography, Micromachining and Microfabrication, Vol. 1 Ch. 2: Microlithography
• Wikibook: The Opensource Handbook of Microtechnology
• Wikibook: The Opensource Handbook of Nansciece and Nanotechnology

Specific Guides

• CNF Baseline Process Data (Lithography, Thin File Deposition, Characterization)
• EBL Resists
• Photoresists
• Etchants (Berkeley Microlab)
• Wiki Wet Etching Processes

© 2009 The Lai Group | Department of Physics and Astronomy | Michigan State University