Instructions for the Temporary
             RF Generator for the Plasma Etcher
            ------------------------------------


                                              Rev. 13-Dec-2022


     This temporary RF Generator for the Plasma Etcher is not
     controlled by the Plasma Etcher itself.  Rather you must
     manual control this temporary RF Generator via its front
     panel controls.

     When the the plasma chamber is pumped down and you have
     established the oxygen flow through it and are ready to
     turn On the RF power to ionize the oxygen, do the
     following steps:

      1. Push in the  Power On/Off  button in the lower right
         hand corner of the RF Generator's front panel.  Wait
         a few seconds while the generator initializes itself.
         The 4 lines on its LCD Display should then show:


                 SET:   0W   REF:   0W
                 PANEL  PWR  MST
                 blank   blank   blank
                 PMG   DOWN   UP   ENT


      2. Click the  RF On/Off  button  at the right-hand side
         of the front panel.  The Blue LED above this button
         should go OFF and the RED LED above this button should
         illuminate.

      3. Now use the Up Arrow and Down Arrow keys in the middle
         of the front panel to adjust the output power level.
         You may select an output power up to 300 Watts.

         These keys are a bit flaky and you may need to tap
         them multiple times.  Holding a key down should cause
         the power setting to ramp up or down.

         While you are touching these keys the top line of the
         LCD display will show:

                 SET:  ijk W     REF:  xy W


         The  SET:  value is the output power that you are asking
         for in Watts.  A second or two after you finish touching
         the power up down keys the LCD display will show:

                 FWD:   ijk W     REF:   xy W


         The  FWD:  value is the "Forward" power actually being
         delivered to the load, i.e. being used to ionize oxygen
         in the chamber  (or lost as heat due to resistance in
         the conductors).







         The  REF:  value is the power in Watts that is
         "Reflected" by the load and send back to the generator
         because of an impedance mismatch.  This reflected power
         should be small,  e.g. less than 10 Watts.  This power
         returned to the generator is lost as heat.


     NOTE:  It should not be necessary to touch any of the
            4 keys that are under the LCD display.


     When you want to stop the RF Power just tap the  RF On/Off
     button.  The RED LED above this button will go Off and the
     Blue LED will illuminate.

     You may turn the RF Power back On, at its previous power
     setting, by just touching the RF On/Off button again.


     When you are finished using the RF Generator:  turn Off
     the RF Power  and  then push the Power On/Off button at
     the lower right-hand corner of the front panel to
     completely turn Off the RF Generator.  All LEDs and the
     LCD display will go out when the power to the generator
     has been turned Off.